Inventors:
Chiwoei Wayne Lo - Campbell CA
Daniel N. Bui - Castro Valley CA
Assignee:
Schlumberger Technologies, Inc. - San Jose CA
International Classification:
G02B 2126
G02B 2100
Abstract:
A stage assembly for holding a work-piece in a charged particle microscopy system includes a magnetic motor (e. g. , brushless linear servo motor) for driving an X-platform riding on a base along the X axis, a non-magnetic linear motor (e. g. , piezoelectric motor) for driving a Y-platform riding on the X-platform along the Y axis, and a non-magnetic rotary motor (e. g. , piezoelectric motor) for rotating a rotary platform over the Y-platform, wherein the duty cycle of the magnetic motor is substantially greater than the duty cycle of the non-magnetic linear and rotary motors. This along with the particular arrangement of the motors and the platforms yields a compact, durable, and vacuum compatible stage which has minimal mechanical vibrations, minimal interference with the charged particle microscope, minimal particle generation, and high speed area coverage.
