Hyung J Park, 6281 Lakeview Dr, Westwood, NJ 07675

7824743, Nov 2, 2010

Sep 28, 2007

11/864100

Wei Ti Lee - San Jose CA, US
Yen-Chih Wang - Hsinchu, TW
Mohd Fadzli Anwar Hassan - Sunnyvale CA, US
Ryeun Kwan Kim - Ichon-shi, KR
Hyung Chul Park - San Jose CA, US
Ted Guo - Palo Alto CA, US
Alan A. Ritchie - Pleasanton CA, US

Applied Materials, Inc. - Santa Clara CA

B05D 5/12
H01L 21/04
H01L 21/203
H05H 1/24

427576, 427 971, 4271263, 438640, 438656, 438685, 257751, 257763

Embodiments described herein provide a method for forming two titanium nitride materials by different PVD processes, such that a metallic titanium nitride layer is initially formed by a PVD process in a metallic mode and a titanium nitride retarding layer is formed over a portion of the metallic titanium nitride layer by a PVD process in a poison mode. Subsequently, a first aluminum layer, such as an aluminum seed layer, may be selectively deposited on exposed portions of the metallic titanium nitride layer by a CVD process. Thereafter, a second aluminum layer, such as an aluminum bulk layer, may be deposited on exposed portions of the first aluminum layer and the titanium nitride retarding layer during an aluminum PVD process.

8038887, Oct 18, 2011

Aug 23, 2006

12/064604

Olgica Bakajin - San Leandro CA, US
Jason Holt - Berkeley CA, US
Aleksandr Noy - Belmont CA, US
Hyung Gyu Park - Oakland CA, US

Lawrence Livermore National Security, LLC - Livermore CA

B01D 61/00
B01D 39/00
B01D 29/00
B01C 65/00

210652, 21050027, 21050025, 2105021, 210490, 264 41, 264555, 977751, 4283044, 42344723, 427291

Nanoporous membranes comprising single walled, double walled, and multiwalled carbon nanotubes embedded in a matrix material were fabricated for fluid mechanics and mass transfer studies on the nanometer scale and commercial applications. Average pore size can be 2 nm to 20 nm, or seven nm or less, or two nanometers or less. The membrane can be free of large voids spanning the membrane such that transport of material such as gas or liquid occurs exclusively through the tubes. Fast fluid, vapor, and liquid transport are observed. Versatile micromachining methods can be used for membrane fabrication. A single chip can comprise multiple membranes. These membranes are a robust platform for the study of confined molecular transport, with applications in liquid and gas separations and chemical sensing including desalination, dialysis, and fabric formation.