Inventors:
Karl K. Berggren - Arlington MA, US
Xiaolong Hu - Ann Arbor MI, US
Daniele Masciarelli - Settimo Torinese, IT
Assignee:
Massachusetts Institute of Technology - Cambridge MA
International Classification:
H01L 39/12
H01L 39/02
H01L 39/24
US Classification:
505160, 505470, 505330, 505410, 505411, 505473, 505181, 505237, 505191, 427 63, 216 13, 250200, 2503384, 438 2, 257 30, 257E39001, 4281951, 430296
Abstract:
Systems, articles, and methods are provided related to nanowire-based detectors, which can be used for light detection in, for example, single-photon detectors. In one aspect, a variety of detectors are provided, for example one including an electrically superconductive nanowire or nanowires constructed and arranged to interact with photons to produce a detectable signal. In another aspect, fabrication methods are provided, including techniques to precisely reproduce patterns in subsequently formed layers of material using a relatively small number of fabrication steps. By precisely reproducing patterns in multiple material layers, one can form electrically insulating materials and electrically conductive materials in shapes such that incoming photons are redirected toward a nearby electrically superconductive materials (e.g., electrically superconductive nanowire(s)). For example, one or more resonance structures (e.g., comprising an electrically insulating material), which can trap electromagnetic radiation within its boundaries, can be positioned proximate the nanowire(s). The resonance structure can include, at its boundaries, electrically conductive material positioned proximate the electrically superconductive nanowire such that light that would otherwise be transmitted through the sensor is redirected toward the nanowire(s) and detected. In addition, electrically conductive material can be positioned proximate the electrically superconductive nanowire (e.g. at the aperture of the resonant structure), such that light is directed by scattering from this structure into the nanowire.