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Ai T Koh, 64Cedar Park, TX

Known as:
Ai Tieu Koh
Related to:
Chee Koh 64

Ai Koh Phones & Addresses

Cedar Park, TX   

Austin, TX   

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Us Patents

Process For Forming A Semiconductor Device And A Process For Operating An Apparatus

US Patent:
6245686, Jun 12, 2001
Filed:
Jun 5, 2000
Appl. No.:
9/586828
Inventors:
Jeffrey D. Rose - Austin TX
Michael J. Hartig - Austin TX
David G. Farber - Austin TX
Danny R. Babbitt - Austin TX
Jason A. Rivers - Austin TX
Ai Koh - Cedar Park TX
Terry G. Sparks - Austin TX
Assignee:
Motorola Inc. - Schaumburg IL
International Classification:
H01L 21302
H01L 21461
US Classification:
438729
Abstract:
A process for forming a semiconductor device includes placing a substrate (104) into an apparatus (300), creating a plasma, and processing the substrate (104). The apparatus (300) includes an electromagnetic source (120), a bulk material (302), and a first barrier layer (304). The bulk material (302) is between the electromagnetic source (120) and an interior (126) of the apparatus (300). The first barrier layer (304) is between the bulk material (302) and the interior (126). A process for operating an apparatus (300) includes forming a polymer layer along an inorganic layer (302, 306or 702), wherein the polymer layer is formed within the apparatus (300); removing the polymer layer to expose the inorganic layer (302, 306, or 702); and etching at least a portion of the exposed inorganic layer (302, 306, or 702). Typically, the inorganic layer (203, 306, or 702) is semiconductive or resistive.

Possible Relatives

Dae H Koh  Deborah H Koh  Danny A Koh  Diane Y Koh  Ellen C Koh  Esther H Koh  Eugene Y Koh  Ai D Lam  Ai Li  Ai T Ling 

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