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Attila Laszlo Balazs Deceased3021 SW 4Th Pl, Cape Coral, FL 33914

Attila Balazs Phones & Addresses

2121 45Th St, Cape Coral, FL 33914    239-9458461   

5003 8Th St, Cape Coral, FL 33914    239-5410028    239-9457008   

3065 Santa Barbara Blvd, Cape Coral, FL 33993    239-5741916   

3423 Santa Barbara Blvd, Cape Coral, FL 33914    239-5497408    239-5404490   

3429 Santa Barbara Blvd, Cape Coral, FL 33914    239-5404490   

5130 2Nd St, Cape Coral, FL 33914    239-5410028    239-9457008   

723 51St St, Cape Coral, FL 33914    239-5410028    239-9457008   

Vancouver, WA   

Punta Gorda, FL   

Lee, FL   

Mentions for Attila Laszlo Balazs

Publications & IP owners

Us Patents

Integrated Process Tool Monitoring System For Semiconductor Fabrication

US Patent:
6650958, Nov 18, 2003
Filed:
Oct 30, 2002
Appl. No.:
10/283688
Inventors:
Attila Balazs - Clackamas OR
Bruce Whitefield - Camas WA
Hiroshi Mizuno - Gresham OR
Russell Whaley - Gresham OR
Paul Szasz - Gresham OR
Steven Reder - Boring OR
Assignee:
LSI Logic Corporation - Milpitas CA
International Classification:
G06F 1900
US Classification:
700121, 700108, 700117, 438 5
Abstract:
An integrated process tool monitoring system for semiconductor fabrication. Specifically, a process tool parameter auditing system, where a process tool user need not run a different verification system for each process tool type used and need not download parameters every time before a semiconductor device or material is to be processed by the process tool.

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