Brian D Severson, 65295 Grove St, Iola, WI 54945

7229339, Jun 12, 2007

Jul 2, 2004

10/884371

John F. Stumpf - Phoenix AZ, US
Franklin D. Root - Phoenix AZ, US
Brian Severson - Chandler AZ, US
David Marquardt - Phoenix AZ, US
John Derwood Herb - Phoenix AZ, US
James Jed Crawford - Chandler AZ, US
Rand Conner - Chandler AZ, US
Jasent Montano - Chandler AZ, US
Kevin Bertsch - Gilbert AZ, US
Robert Marshall Stowell - Wilsonville OR, US
Edmund Minshall - Sherwood OR, US
Timothy Cleary - Portland OR, US

Novellus Systems, Inc. - San Jose CA

B24B 5/00

451 8, 451 41, 451285

Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.

7335092, Feb 26, 2008

Oct 27, 2006

11/553580

Brian Severson - Chandler AZ, US
John Stumpf - Phoenix AZ, US
Stephen C. Schultz - Gilbert AZ, US

Novellus Systems, Inc. - San Jose CA

B24B 7/22

451288, 451388, 451398

A carrier head for supporting a workpiece is provided. The carrier head comprises a mount plate having an aperture therethrough, and a clamp ring having a foot portion and a first leg portion extending therefrom. The first leg portion extends through the aperture, and the foot portion abuts the mount plate proximate the aperture. A flexible bladder has first and second ribs that are received between the mount plate and the foot portion. An annular fastener is removably coupled to the leg portion, and engages the mount plate to cause the first and second ribs to be sealingly secured between the mount plate and the foot portion.

7402098, Jul 22, 2008

Oct 27, 2006

11/553572

Brian Severson - Chandler AZ, US
John Stumpf - Phoenix AZ, US
Stephen C. Schultz - Gilbert AZ, US

Novellus Systems, Inc. - San Jose CA

B24B 7/22

451288, 451398, 451388

An edge control system for deployment on a CMP carrier head comprising a bladder and a carrier head housing having a passage extending therethrough. The bladder includes a flexible diaphragm and is coupled to the carrier head housing. The edge control system comprises first and second annular ribs, each of which comprises a first end portion sealingly coupled to the carrier head housing, a second end portion coupled to the diaphragm, and a strain relief member substantially intermediate the first end portion and the second end portion. A plenum is substantially defined by the first and second annular ribs and the carrier head housing. The passage is fluidly coupled to the plenum to permit the pressurization of the plenum, and the strain relief member promotes the extension of the first and second annular ribs away from the carrier head housing when the plenum is pressurized.