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Charlotte W Corbett, 89New Smyrna, FL

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New Smyrna Beach, FL   

Weston, MI   

Cumming, GA   

Ottawa Hills, OH   

Harbor Springs, MI   

PO Box 740, Harbor Springs, MI 49740   

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Us Patents

Suspension Of Nanoparticles And Method For Making The Same

US Patent:
2007025, Nov 1, 2007
Filed:
Jul 27, 2006
Appl. No.:
11/460310
Inventors:
Walter L. Magee - Manitou Beach MI, US
William J. Corbett - Harbor Springs MI, US
Charlotte Corbett - Harbor Springs MI, US
International Classification:
C04B 41/50
C07F 7/18
US Classification:
1062871, 10628713, 10628714, 10628715
Abstract:
A stable suspension of ethylpolysilicate nanoparticles having a size of between about 5 nm and 120 nm are in water and stabilized with between about 0.05 and 5 weight percent tetraalkylammonium hydroxide. The particles are between about 95% and 99.5% hydrolyzed and have superior removal rates when used in chemical mechanical polishing. A process for making ethylpolysilicate nanoparticles includes the step of adding reverse osmosis water and 25% tetramethylammonium hydroxide and ammonium hydroxide to a reactor, agitating the mixture and heating the mixture to about 80 C. Tetraethylalkoxy silane is added to the mixture and the mixture stirred and hydrolyzed. Ethanol is then removed. The mixture was then subjected to a vacuum to remove additional distillate. The material left in the reactor was then transferred to a plastic drum.

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