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Cheng Chang Chiu, 751740 Rolling Hills Rd, Sacramento, CA 95864

Known as:
Cheng C Chiu Cheng Hwei Chiu Cheng H Chiu Cheng Chang Chiucheng Chang Chiu Cheng Chengchang Chiu Yu Chen Chiu Cheng-Chang C Chiu E Chiu Hwei Chiu Cheng Chiu Cheng Chang
Related to:
Danqing Chang

Cheng Chiu Phones & Addresses

1740 Rolling Hills Rd, Sacramento, CA 95864    916-3592452   

1800 Rolling Hills Rd, Sacramento, CA 95864    916-3592452   

707 Regency Cir, Sacramento, CA 95864    916-4864045   

1555 Riviera Ave #520, Walnut Creek, CA 94596    916-4864045   

College Sta, TX   

Mountain View, CA   

Sioux Falls, SD   

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Publications & IP owners

Us Patents

Magnetic Tunnel Junction Element With Ru Hard Mask For Use In Magnetic Random-Access Memory

US Patent:
2020034, Oct 29, 2020
Filed:
Apr 23, 2019
Appl. No.:
16/392440
Inventors:
- Fremont CA, US
Jacob Anthony Hernandez - Morgan Hill CA, US
Cheng Wei Chiu - Milpitas CA, US
International Classification:
H01L 27/22
H01L 43/12
H01L 43/08
H01L 43/02
G11C 11/16
Abstract:
A magnetic memory element having a Ru hard mask layer. The use of Ru advantageously allows for closer spacing of adjacent magnetic memory elements leading to increased data density. In addition, the use of Ru as a hard mask reduces parasitic electrical resistance by virtue of the fact that Ru does not oxidize in ordinary manufacturing environments. The magnetic memory element can be formed by depositing a plurality of memory element layers, depositing a Ru hard mask layer, depositing a RIEable layer over the Ru hard mask layer, and forming a photoresist mask over the hard mask layer. A reactive ion etching can be performed to transfer the image of the photoresist mask onto the RIEable layer to form a RIEable mask. An ion etching can then be performed to transfer the image of the RIAable mask onto the underlying Ru hard mask and underlying memory element layers.

Possible Relatives

Cynthia Chiu  David S Chiu  Daisy Z Chiu  Debby Chiu  Deborah A Chiu  Daniel Chiu  Dennis S Chiu  Cheng S Khoo  Cheng C Kuo  Cheng H Lam 

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