Kim Chi Vu, 641116 Dennis Dr, Costa Mesa, CA 92626

6374859, Apr 23, 2002

Jul 8, 1998

09/111999

Kim N. Vu - Yorba Linda CA
Eric J. Redemann - Laguna Niguel CA
David P. Sheriff - Anaheim Hills CA

Unit Instruments, Inc. - Yorba Linda CA

F16K 2700

137884, 251367

A manifold system for incorporation in a gas panel distribution system for semi-conductor manufacturing includes a plurality of individual manifold blocks with each manifold block having a fluid passageway with an entrance and exit port accessing a common surface. Adjacent manifold blocks are removably interconnected to permit the respective fluid passageways to be in position for interconnection. A plurality of active components can be sealingly fastened to the individual manifold blocks to complete the interconnection of the respective fluid passageways. Each active component can bridge over a pair of adjacent individual manifold blocks and form with the individual manifold blocks an operative gas stick for delivering gas to a semiconductor tool. The individual manifold blocks can be identical in configuration and can include a first upper flange on one side and a second lower flange on an opposite side to enable an interlocking of adjacent manifold blocks.

6394138, May 28, 2002

Jan 13, 1999

09/229722

Kim N. Vu - Yorba Linda CA
Eric J. Redemann - Laguna Niguel CA
David P. Sherriff - Anaheim Hills CA

Unit Instruments, Inc. - Yorba Linda CA

F16K 2700

137884, 137597, 2851245

A manifold system for enabling a distribution of fluids includes a plurality of individual manifold blocks that can be joined together to form a gas stick. Each manifold block will have a fluid passage way with an entrance port and exit port accessing a common surface. An active component can be mounted to one manifold block, while extending across a port of an adjacent manifold block. An alignment system can be provided to ensure that the entrance and exit ports are positioned in a plane containing the common surface to facilitate sealing.

6435215, Aug 20, 2002

Aug 23, 2001

09/939487

Eric J. Redemann - Laguna Niguel CA
Kim N. Vu - Yorba Linda CA

Unit Instruments, Inc. - Yorba Linda CA

F16K 2700

137884, 137269

A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

6474700, Nov 5, 2002

Dec 7, 2000

09/732434

Eric J. Redemann - Laguna Niguel CA
Kim N. Vu - Yorba Linda CA

Unit Instruments, Inc. - Yorba Linda CA

F16L 1700

285379, 277616

A gas panel for use with a tool for manufacturing a semiconductor includes a one-piece manifold body having an inlet for receiving a process gas. The manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.

6769463, Aug 3, 2004

May 16, 2002

10/147427

Kim Ngoc Vu - Yorba Linda CA

Celerity Group, Inc. - Santa Clara CA

G05D 700

141 98, 137486, 137884

The present application relates to fluid flow systems and more particularly to fluid flow systems for use in the semiconductor industry. In one embodiment, the present invention is directed to a fluid stick adapted to be mounted to a mounting surface. The fluid stick includes a first flow component positioned in the fluid stick and a second flow component positioned in the fluid stick between the first flow component and the mounting surface and in fluid connection with the first flow component.

7225835, Jun 5, 2007

Sep 21, 2005

11/232031

Kim Ngoc Vu - Yorba Linda CA, US

Celerity, Inc. - Austin TX

F16K 11/10

137884

A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.

7334605, Feb 26, 2008

Aug 26, 2003

10/650102

Kim Vu - Yorba Linda CA, US

Celerity, Inc. - Austin TX

F16K 11/10

137884

A gas panel comprising a first gas stick, a second gas stick, and a first manifold. The first gas stick has a first flow path that includes a first plurality of ports formed in a common plane, and the second gas stick has a second flow path that includes a second plurality of ports formed in the common plane. The first manifold has first and second ports formed in the common plane, the first port being fluidly connected to one port of the first plurality of ports of the first gas stick, and the second port being fluidly connected to one port of the second plurality of ports of the second gas stick. A thermally and vibrationally insulating mounting assembly may be used to mount the first and second gas sticks to a mounting plate.

8307854, Nov 13, 2012

May 11, 2010

12/777327

Kim Ngoc Vu - Yorba Linda CA, US

Vistadeltek, Inc. - Yorba Linda CA

F16K 11/10

137884

A fluid delivery system that includes flow substrates and manifolds that minimize the number of fluid conduit ports and seals needed to build standardized fluid delivery sticks. Each flow substrate has a component attachment surface with one or more component conduit ports and an associated plurality of fastener apertures. Some flow substrates incorporate a transverse manifold connection conduit port on a surface opposite the component attachment surface. Fastener apertures associated with the transverse manifold connection conduit port are accessible adjacent to installed fluid handling components. Transverse connection between fluid delivery sticks use a welded assembly of fluid conduits to provide a transverse connecting lower layer which is sealingly retained by fasteners inserted from above through apertures associated with the transverse manifold connection conduit port. Flow substrates for each fluid delivery stick are fastened to a standardized bracket and each fluid delivery stick arrangement can be assembled and tested as an integrated subassembly.