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Danny Lim, 711038 Lincoln Ave, Alameda, CA 94501

Related to:
Belinda F Lim 49 Cheng Wey Lim 71

Danny Lim Phones & Addresses

1038 Lincoln Ave, Alameda, CA 94501    510-5231839    510-5238475   

1038 Lincoln Ave APT C, Alameda, CA 94501    510-8395492   

2158 San Jose Ave #C, Alameda, CA 94501   

Los Angeles, CA   

South Lake Tahoe, CA   

632 Madison St, Oakland, CA 94607    510-8395492   

Stamford, NY   

Hayward, CA   

Santa Clara, CA   

Tenafly, NJ   

Work

Company: Baskin robbins 31 ice cream stores Address: 7628 Reseda Blvd, Los Angeles, CA 91335 Phones: 818-9960383 Position: Manager Industries: Eating Places
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Publications & IP owners

Us Patents

Apparatus And Method For Controlling Fluid Material Composition On A Polishing Pad

US Patent:
7166015, Jan 23, 2007
Filed:
Dec 19, 2003
Appl. No.:
10/741933
Inventors:
Yehiel Gotkis - Fremont CA, US
Danny Lim - Fremont CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
B24B 49/00
B24B 51/00
B24B 1/00
B24B 7/00
US Classification:
451 8, 451 41, 451 56, 451287, 451443, 451444
Abstract:
An apparatus for use in a chemical mechanical planarization system is provided. The apparatus includes a fluid displacing device and a fluid delivery device. The fluid displacing device is capable of being positioned at a proximate location over a polishing pad, the fluid displacing device configured to displace at least part of a first fluid from a region of the polishing pad. The fluid delivery device is capable of replacing the displaced first fluid with a second fluid at the region of the polishing pad, the second fluid being different than the first fluid. A method of controlling properties of a film present over a polishing pad surface is also provided.

Possible Relatives

David B Lim  Cyril P Lim  Dae Q Lim  Deanna R Lim  Dale L Lim  Debbie M Lim  Damon W Lim  Danny E Johnson  Danny R Stancil  Danny R Johnston 

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