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David G Courage, 67Wake Forest, NC

David Courage Phones & Addresses

Wake Forest, NC   

1310 Durlain Dr, Raleigh, NC 27614    919-6761858    919-6765827   

1310 Durlain Dr #104, Raleigh, NC 27614    919-6761858   

109 Parakeet Ln, Raleigh, NC 27614    919-8707058    919-6761858   

609 Weathergreen Dr, Raleigh, NC 27615    919-8707058   

6653 Lake Hill Dr #L, Raleigh, NC 27609    919-8707058   

Haverhill, MA   

Chapel Hill, NC   

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David Courage

Location:
Durham, NC
David Courage Photo 24

David Courage

Publications & IP owners

Us Patents

Method And Device For Protecting Micro Electromechanical Systems Structures During Dicing Of A Wafer

US Patent:
6946326, Sep 20, 2005
Filed:
Dec 5, 2001
Appl. No.:
10/006964
Inventors:
Timothy R. Spooner - Dunstable MA, US
Kieran P. Harney - Cambridge MA, US
David S. Courage - Methuen MA, US
John R. Martin - Foxborough MA, US
Assignee:
Analog Devices, Inc. - Norwood MA
International Classification:
H01L021/44
US Classification:
438113, 438118, 438458, 257620
Abstract:
A wafer cap protects micro electromechanical system (“MEMS”) structures during a dicing of a MEMS wafer to produce individual MEMS dies. A MEMS wafer is prepared having a plurality of MEMS structure sites thereon. Upon the MEMS wafer, the wafer cap is mounted to produce a laminated MEMS wafer. The wafer cap is recessed in areas corresponding to locations of the MEMS structure sites on the MEMS wafer. The capped MEMS wafer can be diced into a plurality of MEMS dies without causing damage to or contaminating the MEMS die.

Method And Device For Protecting Micro Electromechanical Systems Structures During Dicing Of A Wafer

US Patent:
6946366, Sep 20, 2005
Filed:
Dec 5, 2001
Appl. No.:
10/006966
Inventors:
Timothy R. Spooner - Dunstable MA, US
David S. Courage - Methuen MA, US
Brad Workman - Needham MA, US
Assignee:
Analog Devices, Inc. - Norwood MA
International Classification:
H01L021/46
H01L021/50
US Classification:
438460, 438110, 438462, 438464
Abstract:
A wafer cap protects micro electromechanical system (“MEMS”) structures during a dicing of a MEMS wafer to produce individual MEMS dies. A MEMS wafer is prepared having a plurality of MEMS structure sites thereon. Upon the MEMS wafer, the wafer cap is mounted to produce a laminated MEMS wafer. The wafer cap is recessed in areas corresponding to locations of the MEMS structure sites on the MEMS wafer. The capped MEMS wafer can be diced into a plurality of MEMS dies without causing damage to or contaminating the MEMS die.

Method And Device For Protecting Micro Electromechanical Systems Structures During Dicing Of A Wafer

US Patent:
7022546, Apr 4, 2006
Filed:
Dec 5, 2001
Appl. No.:
10/007585
Inventors:
Timothy R. Spooner - Dunstable MA, US
David S. Courage - Methuen MA, US
Brad Workman - Needham MA, US
Assignee:
Analog Devices, Inc. - Norwood MA
International Classification:
H01L 21/44
US Classification:
438106, 438110, 438113
Abstract:
A wafer cap protects micro electromechanical system (“MEMS”) structures during a dicing of a MEMS wafer to produce individual MEMS dies. A MEMS wafer is prepared having a plurality of MEMS structure sites thereon. Upon the MEMS wafer, the wafer cap is mounted to produce a laminated MEMS wafer. The wafer cap is recessed in areas corresponding to locations of the MEMS structure sites on the MEMS wafer. The capped MEMS wafer can be diced into a plurality of MEMS dies without causing damage to or contaminating the MEMS die.

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