Frank W Roberts DeceasedAtlanta, GA

6956223, Oct 18, 2005

Apr 10, 2002

10/119290

Theodore H. Smick - Essex MA, US
Frank D. Roberts - North Reading MA, US
Marvin Farley - Ipswich MA, US
Geoffrey Ryding - Manchester MA, US
Takao Sakase - Rowley MA, US
Adrian Murrell - Horsham, GB
Peter Edwards - Kingsfold, GB
Bernard Harrison - Copthorne, GB

Applied Materials, Inc. - Santa Clara CA

B05C005/00

25049221, 118620, 25044211, 414217, 414422

Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm of a substrate or wafer holder , in at least two generally orthogonal directions (so-called X-Y scanning). Scanning in a first direction is longitudinally through an aperture in a vacuum chamber wall. The arm is reciprocated by one or more linear motors A, B. The arm is supported relative to a slide using gimballed air bearings so as to provide cantilever support for the arm relative to the slide. A compliant feedthrough into the vacuum chamber for the arm then acts as a vacuum seal and guide but does not itself need to provide bearing support. A Faraday is attached to the arm adjacent the substrate holder to allow beam profiling to be carried out both prior to and during implant. The Faraday can instead or additionally be mounted adjacent the rear of the substrate holder or at 90 to it to allow beam profiling to be carried out prior to implant, with the substrate support reversed or horizontal and out of the beam line.

4803754, Feb 14, 1989

May 5, 1987

7/046156

Frank D. Roberts - North Reading MA

Conrac Corporation - Stamford CT

E05F 300

16 49

A door holder-closer comprising a conventional door closer and a novel electromechanical door holder attached to the drive spindle of the door closer. The door holder features a lever which is coupled to the drive spindle of the door closer by an adjustable clamp comprising mating rotor and cone elements. Both the rotor and the cone are seated over the drive spindle with the cone being fixed to the spindle. The rotor is formed with a projecting rotor tab which is selectively engaged by a pawl. The lever is formed with a notch which selectively engages a roller driven by an electromagnet-actuated armature. The motion of the door closer spindle is restrained by a primary latch formed when the roller is seated within the lever notch in response to an energized electromagnet, and by a secondary latch formed when the pawl engages the rotor tab. The primary latch supports and controls the secondary latch. Hold-open door control occurs when both latches are in effect concurrently.