Howard A Bender, 56Santa Fe, NM

7034322, Apr 25, 2006

Jun 7, 2001

09/877329

Howard A. Bender - Ripon CA, US

EUV LLC - Santa Clara CA

H01K 7/00

250504R, 250292, 25049221

A fluid jet or filament source and a pair of coaxial high voltage electrodes, in combination, comprise an electrical discharge system to produce radiation and, in particular, EUV radiation. The fluid jet source is composed of at least two serially connected reservoirs, a first reservoir into which a fluid, that can be either a liquid or a gas, can be fed at some pressure higher than atmospheric and a second reservoir maintained at a lower pressure than the first. The fluid is allowed to expand through an aperture into a high vacuum region between a pair of coaxial electrodes. This second expansion produces a narrow well-directed fluid jet whose size is dependent on the size and configuration of the apertures and the pressure used in the reservoir. At some time during the flow of the fluid filament, a high voltage pulse is applied to the electrodes to excite the fluid to form a plasma which provides the desired radiation; the wavelength of the radiation being determined by the composition of the fluid.

5172388, Dec 15, 1992

Jul 23, 1991

7/734499

David C. Long - Wappingers Falls NY
Howard A. Bender - Fishkill NY
William D. Carbaugh - Marlboro NY
Mark J. La Plante - Walden NY
Christopher D. Setzer - Wappingers Falls NY

International Business Machines Corporation - Armonk NY

H01S 3091

372 70

A solid state lasing rod is spun on its long axis. The rod is pumped with photons while it spins. The rod is greater in diameter than the aperture. The rod is aligned off-center from the center of the aperture so that different portions of the rod are exposed to the aperture for lasing. The repetition rate of the lasing of the laser is increased because as the rod spins, the area of the rod that is not lasing is being charged. The laser rod can also be hollow to allow for pumping of the photons from either outside or inside the hollow bore or both. Similarly, this hollow bore in the laser rod could also allow cooling fluids to be circulated therethrough.

5233624, Aug 3, 1993

Sep 30, 1992

7/954523

Mark J. LaPlante - Walden NY
Howard A. Bender - Oviedo FL
William D. Carbaugh - Marlboro NY
David C. Long - Wappingers Falls NY
Christopher D. Setzer - Wappingers Falls NY

International Business Machines Corporation - Armonk NY

H01S 308

372 98

A solid state lasing medium is pumped to produce a high repetition rate laser beam. The laser medium is pumped to cause maximum population inversion. The laser medium is greater in diameter than the aperture that defines the allowable beam path. In the preferred embodiment the off-axis laser beam that is produced is steered to become an on-axis laser beam using a novel SBSA (spinning beam steering assembly). The output of the laser is increased because as the SBSA spins, the area of the lasing medium that is not lasing is being charged or pumped. The laser medium can also be hollow to allow for pumping from either outside or inside the hollow bore or both. Similarly, this hollow bore in the laser medium could also allow cooling fluids to be circulated therethrough. Different embodiments of the SBSA are disclosed, including a variety of methods to pump the laser medium. Also, disclosed is a novel field removable or replaceable laser medium housing assembly.