Jeremy Boyer resumes & CV records
Resumes
Jeremy Boyer
Location:
United States
Jeremy Boyer
Location:
United States
Jeremy J Boyer, 49Woolwich, ME
Jeremy Boyer Phones & Addresses
Woolwich, ME
Deerfield, NH
Newburyport, MA
Somerset, NJ
Chelmsford, MA
Los Gatos, CA
San Jose, CA
Campbell, CA
10 Maple Ave, Chelmsford, MA 01824
Mentions for Jeremy J Boyer
Publications & IP owners
Us Patents
Automated Cassette-To-Cassette Substrate Handling System
US Patent:
2013022, Aug 29, 2013
Filed:
Feb 27, 2012
Appl. No.:
13/406076
Inventors:
Joseph Arthur Kraus - Hamilton NJ, US
Jeremy James Boyer - Chelmsford MA, US
Michael DeChellis - Brooklyn NJ, US
Michael Koo - Somerset NJ, US
Jeremy James Boyer - Chelmsford MA, US
Michael DeChellis - Brooklyn NJ, US
Michael Koo - Somerset NJ, US
Assignee:
VEECO INSTRUMENTS INC. - Plainview NY
International Classification:
H01L 21/677
G05D 3/00
G05D 3/00
US Classification:
700228, 414805
Abstract:
An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
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