Inventors:
Jiang Liu - Olney MD
David Morton - Columbia MD
Philip Krzyzkowski - Red Bank NJ
M. Robert Miller - Neptune NJ
Assignee:
The United States of America as represented by the Secretary of the Army - Washington DC
International Classification:
H01J 146
H01J 102
Abstract:
A method for forming a field emission flat panel display includes deposit a conductive patterned layer on a substrate, depositing an emitter material over the patterned layer, patterning the emitter material to provide a series of mask caps, etching the emitter material to provide arrays of emitter peaks with the mask caps thereon, depositing a dielective layer on the patterned layer and on the mask caps, depositing a conductive gate layer on the dielectric layer, depositing a high-resistivity dielectric layer on the gate layer, depositing a low-resistivity dielectric layer on the high-resistivity dielectric layer, and etching away portions of the dielectric layer, gate layer, high-resistivity dielectric layer and low-resistivity dielectric layer to expose the mask caps, and removing the mask caps to expose the emitter peaks to provide an emitter cathode panel, providing a transparent panel having a conductive coating thereon, and depositing a layer of thin film phosphors on the conductive coating to provide an anode screen, and attaching the anode screen to the cathode panel.