Inventors:
- Boise ID, US
Matthew J. King - Boise ID, US
Jason Reece - Boise ID, US
Michael J. Gossman - Meridian ID, US
Shruthi Kumara Vadivel - Boise ID, US
Martin J. Barclay - Middleton ID, US
Lifang Xu - Boise ID, US
Joel D. Peterson - Boise ID, US
Matthew Park - Boise ID, US
Adam L. Olson - Boise ID, US
David A. Kewley - Boise ID, US
Xiaosong Zhang - Boise ID, US
Justin B. Dorhout - Boise ID, US
Zhen Feng Yow - Singapore, SG
Kah Sing Chooi - Singapore, SG
Tien Minh Quan Tran - Singapore, SG
Biow Hiem Ong - Singapore, SG
International Classification:
H01L 23/528
H01L 23/522
H01L 21/768
Abstract:
A microelectronic device includes a stack structure including a vertically alternating sequence of conductive structures and insulating structures arranged in tiers, a dielectric-filled opening vertically extending into the stack structure and defined between two internal sidewalls of the stack structure, a stadium structure within the stack structure and comprising steps defined by horizontal ends of at least some of the tiers, a first ledge extending upward from a first uppermost step of the steps of the stadium structure and interfacing with a first internal sidewall of the two internal sidewalls of the stack structure, and a second ledge extending upward from a second, opposite uppermost step of the steps of the stadium structure and interfacing with a second, opposite internal sidewall of the two internal sidewalls.