Inventors:
John Lawson - Chandler AZ, US
Dale Irwin - Mesa AZ, US
Steve Chervenak - Phoenix AZ, US
John McIntee - Gold Canyon AZ, US
Assignee:
Tokyo Electron Limited - Tokyo
International Classification:
C23C 14/34
US Classification:
20429811, 2041921, 20419212
Abstract:
An adapter assembly is provided for supporting a sputtering cathode in a fixed opening in the chamber of a sputter coating machine. The assembly includes: one of several adapter bodies, each configured to support, in the fixed opening, a target of one of a plurality of sizes and types, and at one of several target-to-substrate spacings; one of several insulator rings, each for a target of a different size or type; one of several dark-space shields, each for a target of a different size, type, material, or processing pressure; and one of several adapter shields, each for a different adapter body and target material. Only the shields accumulate deposits and require cleaning or replacement. The dark-space shield is spaced from the target rim by a gap of at 0. 045 to 0. 067 inches to form a deep narrow space that prevents deposits onto the insulator ring while avoiding arcing and plasma formation in the gap. A method is provided for existing sputtering machines with the assembly, which accommodates different targets and processes.