Jonathan L Hammond, 43Meridian, ID

7000473, Feb 21, 2006

Apr 20, 2004

10/828042

Jan E. Vandemeer - Mesa AZ, US
Bishnu P. Gogoi - Scottsdale AZ, US
Jonathan H. Hammond - Scottsdale AZ, US

Freescale Semiconductor, Inc. - Austin TX

G01P 15/125

7351432, 7351438

A micro-electromechanical (MEM) device has a folded tether spring in which each fold of the spring is surrounded by a rigidly fixed inner structure and outer structure. The fixed inner structure increases restoring force of the spring. The rigidly fixed inner and outer structures each have a major surface that include a plurality of notches of fixed width relative to a distance between the major surface and the spring. Additionally in one form extensions from the major surface of the rigidly fixed inner and outer structures are provided at distal ends thereof to make initial contact with the spring. The notches of the MEM device both reduce surface area contact with the spring and wick moisture away from the spring to minimize stiction.

7268463, Sep 11, 2007

Jul 28, 2005

11/192874

Gary G. Li - Gilbert AZ, US
Jonathan Hale Hammond - Scottsdale AZ, US

Freescale Semiconductor, Inc. - Austin TX

H02N 1/00

310309, 7351432, 7350412

MEMS devices () and methods for forming the devices have now been provided. In one exemplary embodiment, the MEMS device () comprises a substrate () having a surface, an electrode () having a first portion coupled to the substrate surface, and a second portion movably suspended above the substrate surface, and a stress-release mechanism () disposed on the electrode second portion, the stress-release mechanism () including a first slot () integrally formed in the electrode. In another exemplary embodiment, the substrate () includes an anchor () and the stress-release mechanism is formed adjacent the anchor ().

2007009, Apr 26, 2007

Sep 8, 2005

11/222547

Gary Li - Gilbert AZ, US
Bishnu Gogoi - Scottsdale AZ, US
Hemant Desai - Gilbert AZ, US
Jonathan Hammond - Oak Ridge NC, US
Bernard Diem - Echirolles, FR

H01L 29/82

257414000

A MEMS device and method of fabrication including a plurality of structural tie bars for added structural integrity. The MEMS device includes an active layer and a substrate having an insulating material formed therebetween, first and second pluralities of stationary electrodes and a plurality of moveable electrodes in the active layer. A plurality of interconnects are electrically coupled to a second surface of each of the first and second pluralities of stationary electrodes. A plurality of anchors fixedly attach a first surface of each of the first and second pluralities of stationary electrodes to the substrate. A first structural tie bar couples a second surface of each of the first plurality of stationary electrodes and a second structural tie bar couples a second surface of each of the second plurality of stationary electrodes.

5892252, Apr 6, 1999

Feb 5, 1998

/018976

Jonathan H. Hammond - Scottsdale AZ
Young Sir Chung - Gilbert AZ

Motorola, Inc. - Schaumburg IL

H01L 2358

257252

A field effect transistor (10) for chemical sensing by measuring a change in a surface potential of a gate electrode (48) due to exposure to a fluid has a semiconductor substrate (12) with a trench (18,20). The trench has a first sidewall (30) and a second sidewall (32) disposed opposite the first sidewall to provide a fluid gap (50) for the fluid to be sensed. The gate electrode is disposed overlying the first sidewall of the trench, and a source region (54) and a drain region (56) are disposed in the second sidewall of the trench. A channel region (52) is disposed between the source and drain regions, and the gate electrode is disposed opposite the first channel region across the fluid gap. A heater (26) for regulating the temperature of the gate electrode is disposed in the first sidewall of the trench.

6122963, Sep 26, 2000

Jan 22, 1999

9/235731

Jonathan H. Hammond - Scottsdale AZ
Daniel N. Koury - Mesa AZ
Richard J. August - Scottsdale AZ
Andrew C. McNeil - Scottsdale AZ

Motorola, Inc. - Schaumburg IL

G01P 15125

7351432

An electronic component includes a support substrate (101), a fixed electrode (113) overlying the support substrate (101), a movable electrode (123, 423) overlying the support substrate and the first electrode (113) wherein the first and second electrodes (113, 123, and 423) form a capacitor with a sensing area, an anchor (122, 422) coupled to the support substrate (101), and beams (125, 425) coupling different attachment points (129) of the second electrode (123, 423) to the anchor (122, 422) wherein the different attachment points (129) form a simply connected polygon and wherein a portion of the sensing area is located within the simply connected polygon.

5747839, May 5, 1998

Sep 30, 1996

8/720513

Jonathan H. Hammond - Scottsdale AZ
Young Sir Chung - Gilbert AZ

Motorola, Inc. - Schaumburg IL

H01L 2358

257253

A field effect transistor (10) for chemical sensing by measuring a change in a surface potential of a gate electrode (48) due to exposure to a fluid has a semiconductor substrate (12) with a trench (18, 20). The trench has a first sidewall (30) and a second sidewall (32) disposed opposite the first sidewall to provide a fluid gap (50) for the fluid to be sensed. The gate electrode is disposed overlying the first sidewall of the trench, and a source region (54) and a drain region (56) are disposed in the second sidewall of the trench. A channel region (52) is disposed between the source and drain regions, and the gate electrode is disposed opposite the first channel region across the fluid gap. A heater (26) for regulating the temperature of the gate electrode is disposed in the first sidewall of the trench.

5914521, Jun 22, 1999

Jul 30, 1997

8/903087

Ronald James Gutteridge - Paradise Valley AZ
Daniel Nicolas Koury - Mesa AZ
Daniel Joseph Koch - Mesa AZ
Jonathan Hale Hammond - Scottsdale AZ

Motorola, Inc. - Schaumburg IL

H01L 2982

257415

A sensor (11) has a movable plate (16) that moves in response to an external acceleration. The movable plate (16) has a finger (17) that is capacitively coupled to fingers (13,14) that are attached to a substrate (12). A travel stop (19) is used to stop the movable plate (16) before the finger (17) on the movable plate (16) collides into the fingers (13,14) on the substrate (12).

6228275, May 8, 2001

Dec 10, 1998

9/208924

Daniel J. Koch - Mesa AZ
Jonathan H. Hammond - Scottsdale AZ
Daniel N. Koury - Mesa AZ
Jonathan F. Gorrell - Phoenix AZ

Motorola, Inc. - Schaumburg IL

H01L 21302

216 2

A sensor has a support substrate (200), an electrode (110, 510, 710) movable relative to a surface (201) of the support substrate (200) and comprised of a first material, a structure (160, 460, 560, 760) over a portion of the electrode (110, 510, 710) to limit mobility of the electrode (110, 510, 710) and comprised of a second material different from the first material, and bonding pads (170, 470) outside a perimeter of the electrode (110, 510, 710) and comprised of the second material.