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Resumes
Keqi Zhang, 62Princeton Junction, NJ
Keqi Zhang Phones & Addresses
Princeton Junction, NJ
6 Juniper Ln, Wayland, MA 01778 508-3587388 508-6509924
25 Lakeview Ave, Natick, MA 01760 508-6509924
Lexington, MA
Medford, MA
Somerville, MA
6 Juniper Ln, Wayland, MA 01778 508-3587388
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Keqi Zhang
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Work
Position:
Professional/Technical
Education
Degree:
Graduate or professional degree
Mentions for Keqi Zhang
Publications & IP owners
Us Patents
Vapor Deposition Source
US Patent:
2012024, Sep 27, 2012
Filed:
Mar 22, 2012
Appl. No.:
13/427323
Inventors:
Ralf T. Faber - Lexington MA, US
Ronald A. Crocker - Hanover MA, US
Keqi Zhang - Wayland MA, US
Joseph Patrinostro - Centerville MA, US
James S. Snyder - Suffield MA, US
Ronald A. Crocker - Hanover MA, US
Keqi Zhang - Wayland MA, US
Joseph Patrinostro - Centerville MA, US
James S. Snyder - Suffield MA, US
Assignee:
VACUUM PROCESS TECHNOLOGY LLC - Plymouth MA
International Classification:
C23C 16/448
US Classification:
4272555, 118726
Abstract:
A vapor deposition source for vaporizing a material has a body forming an interior chamber, at least one crucible in the interior chamber, and a divider that divides the interior chamber into a transport channel and a distribution channel. To deposit vapor on an underlying substrate, the deposition source also has a plurality of exit orifices formed in the body adjacent to the distribution channel. The divider has a set of divider apertures between the transport channel and the distribution channel. This divider aperture is positioned generally symmetrically within the interior chamber.
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