Larry J Funk, 79263 Dairy Dr, Kalispell, MT 59901

6191388, Feb 20, 2001

Nov 18, 1998

9/195327

Mark P. Cleaver - Cowiche WA
Gregory J. Wilson - Kalispell MT
Paul R. McHugh - Kalispell MT
Larry J. Funk - Whitefish MT

Semitool, Inc. - Kalispell MT

F27B 514

219390

An injector system for a vertical furnace which has a pedestal and a semiconductor article support within a process container. The injector system includes an injector which is an elongate tube extending into the process chamber. The tube includes a circuitous section in the area of the pedestal to increase residence time for the contents of the tube prior to introduction to the semiconductor articles. A substantially direct section leads from the circuitous section to a discharge end located above the semiconductor article support. The injector system further includes a vertical column heater arranged with the vapor outlet at the upper end of the heater connected via a coupling to the injector in an arrangement to reduce thermal loss.

4872638, Oct 10, 1989

Jan 29, 1988

7/150383

Raymon F. Thompson - Kalispell MT
Larry Funk - Kalispell MT

Semitool, Inc. - Kalispell MT

F16K 31126
F16K 31122

251 54

A slow acting pneumatically operated valve which uses gas pressure and/or pneumatic pressure acting on a diaphragm to counteract the force of a coiled spring, thereby activating a double tapered fluorocarbon plastic poppet against a fluorocarbon plastic valve seat. Actuation of the poppet must be extremely slow and uniform such that fluid in the affected supply line does not experience shocks which can be transmitted to other supply line components. Actuation speed is restricted by use of a damping piston attached to the opposite end of the poppet stem, which restricts the flow of hydraulic fluid to opposite sides of the piston chamber during an actuation cycle. The double taper poppet incorporates an extremely low angle of incidence to the valve seat. Valve opening increases very slowly during the initial opening travel and decreases slowly during final closing travel, thereby further reducing the potential for fluid system shocks.