Maria J Simon DeceasedSomers Point, NJ

6912090, Jun 28, 2005

Mar 18, 2003

10/391330

Avinoam Kornblit - Highland Park NJ, US
Stanley Pau - Hoboken NJ, US
Maria Elina Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G02B027/10

359619, 359621, 359622

An adjustable compound optical microlens apparatus comprises first and second microlenses that are separated from one another along their optical axes. At least one of the microlenses is movable relative to the other. In a preferred embodiment, one microlens is stationary, the other movable. A MEMS controller electrically controls the position of the movable microlens relative to the stationary microlens, or the positions of at least two movable microlenses relative to one another. In accordance with one embodiment of our invention, an array of such microlens apparatuses is also contemplated, especially for applications such optical switches and routers. In accordance with another embodiment of our invention, the apparatus functions as an optical filter or dispersion compensator. Also described is method of compensating for variations in an optical parameter (e. g. , effective focal length) of such an apparatus in an array.

6993219, Jan 31, 2006

Mar 13, 2003

10/387852

Vladimir A. Aksyuk - Piscataway NJ, US
Ho Bun Chan - Summit NJ, US
Dan Fuchs - Summit NJ, US
Dennis S. Greywall - Whitehouse Station NJ, US
Maria E. Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G02B 6/35

385 18, 385 21

A waveguide/MEMS switch adapted to redirect optical signals between output ports based on a phase shift change generated by motion of one or more movable MEMS mirrors incorporated therein. Advantageously, such a switch has a relatively high switching speed and low power consumption. A switch according to one embodiment of the invention includes a planar waveguide device and a planar MEMS device. The MEMS device implements in-plane (i. e. , parallel to the plane of that device) translation of the mirrors. As a result, in certain embodiments of the switch, the waveguide and MEMS devices are connected into a compact planar assembly.

6998758, Feb 14, 2006

Jun 5, 2003

10/455082

Vladimir A. Aksyuk - Piscataway NJ, US
Omar D. Lopez - Summit NJ, US
Flavio Pardo - New Providence NJ, US
Maria E. Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

H02N 1/00
G02B 26/10
G02B 26/08

310309, 359224, 359226, 359291, 385 18

A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mmto about +2 mm.

7068409, Jun 27, 2006

Mar 31, 2004

10/813951

Vladimir Anatolyevich Aksyuk - Piscataway NJ, US
Maria Elina Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G02B 26/08

359224

A freely rotatable micromechanical plate is achieved by employing at least three rotatable plates that are each suspended from a substrate via respective springs, and are coupled via other respective springs to at least three moveable plate attachment points, so that rotation of the rotatable plates about an axis transfers motion to the moveable plate attachment points. Respective posts couple the movement of each respective moveable plate attachment point to a moveable plate. In operation, the rotatable plates may be individually rotated, and the resulting motion of each rotatable plate is passed to its respective moveable plate attachment point. The combined motion of the moveable plate attachment points is passed to the moveable plate via the posts. Using proper control, the plate may be made to tip, tilt and piston. Advantageously, the piston motion may achieve a high vertical movement frequency response.

7142352, Nov 28, 2006

Mar 30, 2005

11/093512

Flavio Pardo - New Providence NJ, US
Maria Elina Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G02B 26/08

359298, 359290, 359291, 359295

A MEMS device achieves a large angle of rotation of a plate about 2 independent axes by employing a handle portion of the plate which is isolated by respective springs coupling the handle portion to each of two actuators. A first actuator, which rotates the mirror about the same axis as done in U. S. Pat. No. 6,781,744 is essentially the same structure disclosed therein, but with the mirror plate thereof shrunken in size. This shrunken plate is coupled by a spring to the mirror plate of the instant invention. Movement of the shrunken plate causes corresponding movement of the handle portion, and hence the mirror. A second actuator, coupled by another spring to the mirror plate of the instant invention, rotates about a second axis that is perpendicular to the first axis and parallel to the substrate. The second actuator includes an actuator plate and an electrode thereunder.

7206117, Apr 17, 2007

Dec 10, 2004

11/009447

Vladimir A. Aksyuk - Piscataway NJ, US
Cristian A. Bolle - Bridgewater NJ, US
Maria E. Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G02B 26/00

359291, 359290

An apparatus having a plurality of arrayed MEMS devices, each device having a parallel-plate actuator and a reflective plate, both of which are mechanically coupled to a flexible beam attached between two anchors. Advantageously, the use of parallel-plate actuators in the apparatus alleviates stringent requirements for the alignment of lithographic masks employed in the fabrication process. In one embodiment, each flexible beam has a relatively small thickness and a relatively large length to effect a relatively large displacement range for the corresponding reflective plate. Movable electrodes of different parallel-plate actuators are configured to act as an electrical shield for the flexible beams, which reduces inter-device crosstalk in the apparatus. Reflective plates of different MEMS devices form a segmented mirror, which is suitable for adaptive-optics and/or maskless lithography applications.

7253550, Aug 7, 2007

May 27, 2005

11/140313

Vladimir Anatolyevich Aksyuk - Westfield NJ, US
Maria Elina Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

H02N 1/00
G02B 26/08

310309, 318116, 359225

Multiple drives are coupled together to cause rotation about a single axis by an arrangement in which two moveable electrode plates flank a fixed electrode plate such that the opposite direction rotations of the two moveable electrode plates are combined. To this end, at least one arm from at least one of the moveable electrode plates is connected to at least one arm of a moveable electrode plate on the opposite side of the fixed electrode plate, e. g. , by a spring. The electrode plates may have comb projections. A post may be coupled at one of its ends to the top of one of the moveable electrode plates, and the post's other end is coupled to a plate, e. g. , a mirror or other structure to be moved.

7253616, Aug 7, 2007

Oct 13, 2005

11/250123

Christian A. Bolle - Bridgewater NJ, US
Maria E. Simon - New Providence NJ, US

Lucent Technologies Inc. - Murray Hill NJ

G01R 33/02
G01R 27/26

324244, 324662

An apparatus comprising a substrate and a MEM device. The MEM includes a comb capacitor and a magnetic element physically connected to one electrode of the comb capacitor. The magnetic element is capable of moving the one electrode in a manner that alters a capacitance of the comb capacitor. The apparatus also includes at least one spring physically connecting the magnetic element to the substrate.