Michael Edward Dutcher, 52Houston, TX

5871321, Feb 16, 1999

Jul 14, 1997

8/892546

Michael Dutcher - Fremont CA
Richard Blume - San Jose CA
Hans Petrusk - Kirtland OH

Applied Materials, Inc. - Santa Clara CA

F16B 1900
F16B 3300

411368

An improved, process compatible fastener is especially useful for securing a member, such as a wafer clamp ring, to an assembly for use in a process environment. The fastener is of a simple design, such that it is readily manufactured, and such that it is not a source of contamination. In particular, an integrated fastener includes both a metal fastener and a cone shaped metal lock washer within a single fastener assembly, such that a single fastener is used for accomplish the function of a screw and a washer. All surfaces of the fastener that are exposed within the process environment are encapsulated in a process compatible material. In this way, the fastener may be secured in the process environment in a single operation without leaving any gaps or partially exposed surfaces that may introduce contaminants into the process environment, such that the integrated fastener also provides the function of a process compatible cap.