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Michael A Matusewic844 Shoal Creek Trl, Chesapeake, VA 23320

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844 Shoal Creek Trl, Chesapeake, VA 23320    715-5612944   

7277 Us Highway 2, Hurley, WI 54534   

5452 Island Lake Rd, Hurley, WI 54534   

5488 Island Lake Rd, Hurley, WI 54534   

2350 Valleyhigh Rd, Rochester, MN 55901   

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Michael A Matusewic

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Michael Matusewic Photo 12

Retired

Location:
Hurley, WI

Publications & IP owners

Us Patents

Silicon-On-Insulator Wafer Having Conductive Layer For Detection With Electrical Sensors

US Patent:
6238935, May 29, 2001
Filed:
Mar 1, 1999
Appl. No.:
9/260404
Inventors:
James L. Egley - Rochester MN
George M. Gut - Rochester MN
Daniel J. Koch - Rochester MN
Michael A. Matusewic - Rochester MN
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2100
US Classification:
438 5
Abstract:
A method for fabricating a silicon-on-sapphire wafer for processing by silicon-wafer-processing equipment. A layer is deposited on a backside of a silicon-on-sapphire wafer, the layer having optical and electrical properties of silicon, wherein the silicon-on-sapphire wafer may be sensed by a sensor designed to sense a presence of a silicon wafer.

Method For Fabricating A Silicon-On-Sapphire Wafer

US Patent:
5877094, Mar 2, 1999
Filed:
Apr 7, 1994
Appl. No.:
8/224451
Inventors:
James L. Egley - Rochester MN
George M. Gut - Rochester MN
Daniel J. Koch - Rochester MN
Michael A. Matusewic - Rochester MN
Assignee:
International Business Machines Corporation - Armonk NY
International Classification:
H01L 2176
US Classification:
438763
Abstract:
A method for fabricating a silicon-on-sapphire wafer for processing by silicon-wafer-processing equipment. A layer is deposited on a backside of a silicon-on-sapphire wafer, the layer having optical and electrical properties of silicon, wherein the silicon-on-sapphire wafer may be sensed by a sensor designed to sense a presence of a silicon wafer.

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