Michael D Smigel, 60Gilbert, AZ

6752442, Jun 22, 2004

Nov 9, 2001

10/040996

Randy McNurlin - Phoenix AZ
Mark Maggio - Phoenix AZ
Michael Smigel - Phoenix AZ
Ann Wilkey - Phoenix AZ
James L. Farmer - Tempe AZ
Shawn Robertson - Phoenix AZ

SpeedFam-IPEC Corporation - Chandler AZ

B66C 110

294106, 294 90, 414739, 414941, 901 39

A two sided wafer handling end-effector provides for the efficient loading and unloading of wafers into and out of a wafer processing apparatus. Each side of the end-effector includes spaced apart rotatable catch mechanisms between which a wafer is firmly grasped. When the end-effector is positioned beneath the wafer processing apparatus, the catch mechanisms are rotated to an open position and a lifting surface on the catch mechanisms lifts the wafer into the wafer processing apparatus. When the catch mechanisms are in the open position, the wafer is centered on the end-effector by rotatable rocker assemblies that contact the edge of the wafer. As the end-effector is raised into contact with the processing apparatus, the rocker assemblies rotate to a lowered position in the end-effector while arcuate surfaces on the assemblies maintain contact with the wafer edge.

6979034, Dec 27, 2005

Mar 12, 2004

10/801404

Randy McNurlin - Phoenix AZ, US
Mark Maggio - Phoenix AZ, US
Michael Smigel - Phoenix AZ, US
Ann Wilkey - Phoenix AZ, US
James L. Farmer - Tempe AZ, US
Shawn Robertson - Phoenix AZ, US

SpeedFam IPEC Corporation - Chandler AZ

B66C001/10
B25J015/08

294106, 294 90, 414739, 414941, 901 39

A two sided wafer handling end-effector provides for the efficient loading and unloading of wafers into and out of a wafer processing apparatus. Each side of the end-effector includes spaced apart rotatable catch mechanisms between which a wafer is firmly grasped. When the end-effector is positioned beneath the wafer processing apparatus the catch mechanisms are rotated to an open position and a lifting surface on the catch mechanisms lifts the wafer into the wafer processing apparatus. When the catch mechanisms are in the open position the wafer is centered on the end-effector by rotatable rocker assemblies that contact the edge of the wafer. As the end-effector is raised into contact with the processing apparatus, the rocker assemblies rotate to a lowered position in the end-effector while arcuate surfaces on the assemblies maintain contact with the wafer edge.

7354335, Apr 8, 2008

Apr 9, 2004

10/821758

David T. Marquardt - Phoenix AZ, US
Joe E. Koeth - Chandler AZ, US
James Jed Crawford - Chandler AZ, US
James Ekberg - Tempe AZ, US
Antoni F. Jakubiec - San Jose CA, US
Michael D. Smigel - Phoenix AZ, US
John F. Stumpf - Phoenix AZ, US

Novellus Systems, Inc. - San Jose CA

B24B 49/00

451 11, 451285, 451331, 414783, 414936, 414941

In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

6567725, May 20, 2003

Jul 15, 2002

10/195619

Ann Wilkey - Phoenix AZ
Michael Smigel - Phoenix AZ

Speedfam-Ipec Corporation - Chandler AZ

G05B 1500

700264, 700218, 700245, 3185681, 31856811, 31856812, 31856815, 31856816, 31856821, 318570, 41441603, 414935, 414936, 414937, 414938, 414939, 414940, 901 40, 901 45, 901 47, 701 23

Apparatus for teaching robot station location relative to a work piece apparatus includes an attachment that can be temporarily coupled to the apparatus and positioned in known relationship to the robot station location. A plurality of positional sensors are mounted on the attachment ring, the sensors each configured to produce a signal when a work piece carried by a robot arm is positioned a predetermined distance from the sensor. A signal receiver is configured to receive signals from the sensors and to indicate which of the sensors has produced the signal. The indication may be the activation of an LED display that indicates to an operator what the next movement of the robot arm should be in order to center the work piece with respect to the robot station location.