Inventors:
Michael R. Stamp - Chandler AZ, US
Frederick J. AmRhein - Fountain Hills AZ, US
Arnold J. Dale - Mesa AZ, US
Joseph C. Pottebaum - Chandler AZ, US
Brian J. Ebert - Phoenix AZ, US
Assignee:
ASM America, Inc. - Phoenix AZ
International Classification:
B01F 3/04
US Classification:
2611211, 261135, 261DIG 65, 118726
Abstract:
A vaporization chamber for a substrate processing system includes a main body, a cover member and a transition member. The main body is made of aluminum and defines a first inner surface, which defines, at least in part, a cavity. The cover member is also made of aluminum. The cover member defines a second inner surface, which also defines, at least in part, the cavity. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extends from a first outer surface through the cover member to the second inner surface. The transition member is made of stainless steel and has a transition outer surface and a transition inner surface. The transition inner surface is aluminum cladded. The cover member includes a carrier gas cover inlet, a liquid source cover inlet, a source cover outlet which extend from a first outer surface through the cover member to second inner surface. The transition inner surface and the cover outer surface are welded together.