Nilesh V Gunda, 5043 Lamplighter Ln, North Chelmsford, MA 01863
Nilesh Gunda Phones & Addresses
43 Lamplighter Ln, North Chelmsford, MA 01863 978-2514646
N Chelmsford, MA
3 Baron Park Ln, Burlington, MA 01803 781-2212119
6 Baron Park Ln, Burlington, MA 01803 781-2722154 781-7508479
Chelmsford, MA
4 Mount Pleasant St, North Billerica, MA 01862 978-6708194
Danville, NH
Saint Louis, MO
Mentions for Nilesh V Gunda
Publications & IP owners
Us Patents
Coated Graphite Article And Reactive Ion Etch Manufacturing And Refurbishment Of Graphite Article
US Patent:
2013010, May 2, 2013
Filed:
Apr 15, 2011
Appl. No.:
13/583316
Inventors:
Richard A. Cooke - Farmingham MA, US
Nilesh Gunda - North Chelmsford MA, US
Steven Donnell - Burlington MA, US
Yan Liu - Arlington MA, US
Nilesh Gunda - North Chelmsford MA, US
Steven Donnell - Burlington MA, US
Yan Liu - Arlington MA, US
International Classification:
C23C 14/48
H01B 5/14
H01B 5/14
US Classification:
428336, 428408, 20419234, 427140
Abstract:
In accordance with an embodiment of the invention, there is provided a coated graphite article. The article comprises graphite; and a conductive coating overlaying at least a portion of the graphite. The conductive coating comprises a through-thickness resistance of less than about 50 ohms as measured through the thickness of the graphite and the conductive coating. In accordance with another embodiment of the invention, there is provided a method for manufacturing a graphite article comprising a conductive coating. The method comprises treating graphite of the article with a reactive ion etch process; and after treating the graphite with the reactive ion etch process, applying the conductive coating over at least a portion of the graphite. In a further embodiment according to the invention, there is provided a method for refurbishing a graphite article comprising graphite and an overlaying conductive coating. The method comprises removing the overlaying conductive coating of the graphite article with a reactive ion etch process; and applying a new conductive coating over at least a portion of the graphite.
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus
US Patent:
2020037, Dec 3, 2020
Filed:
Jun 10, 2020
Appl. No.:
16/898149
Inventors:
- Billerica MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - North Chelmsford MA, US
I-Kuan Lin - Bedford MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - North Chelmsford MA, US
I-Kuan Lin - Bedford MA, US
International Classification:
C23C 28/04
C23C 16/44
C23C 16/455
C23C 16/56
C23C 16/04
C23C 14/24
C23C 14/50
C23C 16/40
C23C 16/44
C23C 16/455
C23C 16/56
C23C 16/04
C23C 14/24
C23C 14/50
C23C 16/40
Abstract:
Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that is deleterious to the substrate article, structure, material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus
US Patent:
2019010, Apr 4, 2019
Filed:
Sep 6, 2018
Appl. No.:
16/123149
Inventors:
- Billerica MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - North Chelmsford MA, US
I-Kuan Lin - Bedford MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - North Chelmsford MA, US
I-Kuan Lin - Bedford MA, US
International Classification:
C23C 28/04
C23C 14/50
C23C 16/40
C23C 16/44
C23C 14/24
C23C 16/455
C23C 14/50
C23C 16/40
C23C 16/44
C23C 14/24
C23C 16/455
Abstract:
Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that deleterious to the substrate article, structure material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.
Coatings For Enhancement Of Properties And Performance Of Substrate Articles And Apparatus
US Patent:
2018004, Feb 15, 2018
Filed:
Feb 13, 2016
Appl. No.:
15/550630
Inventors:
- Billerica MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - Chelmsford MA, US
I-Kuan Lin - Lexington MA, US
David W. Peters - Kingsland TX, US
Weimin Li - New Milford CT, US
Carlo Waldfried - Middleton MN, US
Richard A. Cooke - Framingham MA, US
Nilesh Gunda - Chelmsford MA, US
I-Kuan Lin - Lexington MA, US
International Classification:
C23C 28/04
C23C 16/40
C23C 16/455
C23C 14/24
C23C 14/50
C23C 16/40
C23C 16/455
C23C 14/24
C23C 14/50
Abstract:
Coatings applicable to a variety of substrate articles, structures, materials, and equipment are described. In various applications, the substrate includes metal surface susceptible to formation of oxide, nitride, fluoride, or chloride of such metal thereon, wherein the metal surface is configured to be contacted in use with gas, solid, or liquid that is reactive therewith to form a reaction product that is deleterious to the substrate article, structure, material, or equipment. The metal surface is coated with a protective coating preventing reaction of the coated surface with the reactive gas, and/or otherwise improving the electrical, chemical, thermal, or structural properties of the substrate article or equipment. Various methods of coating the metal surface are described, and for selecting the coating material that is utilized.
Alon Coated Substrate With Optional Yttria Overlayer
US Patent:
2017033, Nov 23, 2017
Filed:
Aug 8, 2017
Appl. No.:
15/671429
Inventors:
- Billerica MA, US
Nilesh Gunda - North Chelmsford MA, US
Nilesh Gunda - North Chelmsford MA, US
International Classification:
H01J 37/32
C23C 14/00
C23C 14/08
C23C 14/06
C23C 14/35
C23C 14/34
C23C 14/00
C23C 14/08
C23C 14/06
C23C 14/35
C23C 14/34
Abstract:
A fluorine plasma resistant coating on a substrate being a component in a semiconductor manufacturing system is disclosed. In one embodiment the composition includes an AlON coating that overlies a substrate, and an optional yttria coating layer that overlies the AlON coating, with a total coating thickness of about 5-6 microns.
Articles Coated With Fluoro-Annealed Films
US Patent:
2016027, Sep 22, 2016
Filed:
Sep 30, 2015
Appl. No.:
14/870981
Inventors:
- Billerica MA, US
Nilesh Gunda - North Chelmsford MA, US
Dennis Radgowski - Brighton MA, US
Chandra Venkatraman - Tyngsboro MA, US
Nilesh Gunda - North Chelmsford MA, US
Dennis Radgowski - Brighton MA, US
Chandra Venkatraman - Tyngsboro MA, US
International Classification:
C23C 14/48
C23C 14/58
C23C 14/58
Abstract:
Articles and methods relating to coatings having superior plasma etch-resistance and which can prolong the life of RIE components are provided. An article has a vacuum compatible substrate and a protective film overlying at least a portion of the substrate. The film comprises a fluorinated metal oxide containing yttrium.
Alon Coated Substrate With Optional Yttria Overlayer
US Patent:
2014017, Jun 26, 2014
Filed:
Aug 9, 2012
Appl. No.:
14/234023
Inventors:
Nilesh Gunda - North Chelmsford MA, US
Assignee:
ENTEGRIS, INC. - Billerica MA
International Classification:
H01J 37/32
US Classification:
428336, 428701, 428432, 4284722, 428446
Abstract:
A fluorine plasma resistant coating on a ceramic substrate is disclosed. In one embodiment the composition includes an AlON coating that is about 2 microns thick that overlies a substrate, and having an optional yttria coating layer that is about microns thick overlies the AlON coating.
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