Inventors:
- Chandler AZ, US
Philip Mather - Phoenix AZ, US
Kenneth Smith - Chandler AZ, US
Sanjeev Aggarwal - Scottsdale AZ, US
Jon Slaughter - Tempe AZ, US
Nicholas Rizzo - Gilbert AZ, US
Assignee:
EverSpin Technologies, Inc. - Chandler AZ
International Classification:
H01L 43/12
G01R 33/09
Abstract:
A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a āZā axis magnetic field onto sensors orientated in the XY plane.