Inventors:
Philip A. Trask - Laguna Hills CA
Gabriel G. Bakhit - Huntington Beach CA
Vincent A. Pillai - Irvine CA
Kirk R. Osborne - Los Angeles CA
Kathryn J. Berg - Long Beach CA
Gary B. Warren - Huntington Beach CA
Assignee:
Hughes Aircraft Company - Los Angeles CA
International Classification:
B44C 122
B29C 3700
C23F 102
C03C 1500
Abstract:
A via (26) is formed through a dielectric layer (8) separating two conductive layers (16,28) by establishing a laterally erodible mask (18) over the dielectric (8), with a window (24) over the desired via location. The mask (18) and exposed dielectric material (8) are eroded simultaneously, preferably by reactive ion etching, producing a via (26) through the dielectric (8) which expands laterally as vertical erosion proceeds. The erosion conditions, the materials for the mask (18) and dielectric (8), and the initial window (24) taper are selected so that the final via (26) is tapered at an angle of less than about 45. degree. to the lower metal layer (6), and preferably about 30. degree. -45. degree. , to enable a generally uniform width for the upper metallization (28) in the via (26). A non-erodible mask (10) is established over the dielectric layer (8) lateral to the via (26) during fabrication to prevent the propagation of pinhole defects from the erodible mask (18) into the dielectric (8), and is normally removed prior to completing the structure.