Steven Chuang resumes & CV records
Resumes
Financial Services Professional
Location:
San Francisco Bay Area
Industry:
Financial Services
Steven Chuang, 37San Jose, CA
Steven Chuang Phones & Addresses
San Jose, CA
Fremont, CA
San Francisco, CA
San Mateo, CA
Berkeley, CA
Saratoga, CA
Ithaca, NY
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Steven Chuang
Linkedin
Industries
Financial Services
Mentions for Steven Chuang
Publications & IP owners
Us Patents
Method For Generating Vertical Profiles In Organic Layer Etches
US Patent:
2018015, May 31, 2018
Filed:
Nov 7, 2017
Appl. No.:
15/805857
Inventors:
- Fremont CA, US
Sangjun CHO - San Ramon CA, US
Steven CHUANG - San Francisco CA, US
Jian WU - Fremont CA, US
Sangjun CHO - San Ramon CA, US
Steven CHUANG - San Francisco CA, US
Jian WU - Fremont CA, US
International Classification:
H01L 21/311
H01L 21/033
H01L 21/027
H01L 21/02
H01L 21/033
H01L 21/027
H01L 21/02
Abstract:
A method for etching an organic carbon based layer below a silicon containing hardmask is provided. An etch gas is provided comprising oxygen and a halogen containing component, and a passivation component, wherein a ratio by volume of total flow rate of the etch gas to flow rate of the halogen containing component is between 10,000:1 to 10:1. The etch gas is formed into a plasma, wherein the organic carbon based layer and the silicon contain hardmask are exposed to the plasma and wherein the plasma selectively etches the organic carbon based layer with respect to the silicon containing hardmask.
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