Timothy W Mcgaughey, 601532 Escuda Rd, Phoenix, AZ 85027
Timothy Mcgaughey Phones & Addresses
1532 Escuda Rd, Phoenix, AZ 85027 623-5162565
Parks, AZ
Kingman, AZ
1532 W Escuda Rd, Phoenix, AZ 85027 623-3997624
Work
Position:
Private Household Service Occupations
Education
Degree:
Associate degree or higher
Mentions for Timothy W Mcgaughey
Publications & IP owners
Us Patents
Partial Clean Fluorine Thermal Cleaning Process
US Patent:
5868852, Feb 9, 1999
Filed:
Feb 18, 1997
Appl. No.:
8/801330
Inventors:
Andrew David Johnson - Doylestown PA
Richard Vincent Pearce - Kempton PA
Charles Anthony Schneider - Gilbert AZ
Timothy Wayne McGaughey - Phoenix AZ
Richard Vincent Pearce - Kempton PA
Charles Anthony Schneider - Gilbert AZ
Timothy Wayne McGaughey - Phoenix AZ
Assignee:
Air Products and Chemicals, Inc. - Allentown PA
Aspect Systems, Inc. - Chandler AZ
Aspect Systems, Inc. - Chandler AZ
International Classification:
B08B 600
C25F 100
C25F 100
US Classification:
134 11
Abstract:
A method for the dynamic cleaning of semiconductor fabrication equipment and particularly quartzware with a thermally activated source of fluorine, such as nitrogen trifluoride, at an elevated temperature, typically at the process operation temperature, wherein the cleaning is terminated prior to complete cleaning and removal of undesired substances allowing rapid restart of fabrication equipment so cleaned.
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