Inventors:
Hung Chih Chen - Santa Clara CA, US
Steven M. Zuniga - Soquel CA, US
Charles C. Garretson - San Jose CA, US
Douglas R. McAllister - Pleasanton CA, US
Jian Lin - Milpitas CA, US
Stacy Meyer - San Jose CA, US
Sidney P. Huey - Fremont CA, US
Jeonghoon Oh - Sunnyvale CA, US
Trung T. Doan - Los Gatos CA, US
Jeffrey Schmidt - San Jose CA, US
Martin S. Wohlert - San Jose CA, US
Kerry F. Hughes - San Francisco CA, US
James C. Wang - Saratoga CA, US
Danny Cam Toan Lu - San Francisco CA, US
Romain Beau De Lamenie - Menlo Park CA, US
Venkata R. Balagani - Gilroy CA, US
Aden Martin Allen - Oakland CA, US
Michael Jon Fong - Mill Valley CA, US
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
B24B 5/00
Abstract:
A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portions. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freely about an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.