Walter A Wolk, 67140 Middle River Rd, Danbury, CT 06811
Walter Wolk Phones & Addresses
140 Middle River Rd, Danbury, CT 06811
Bethel, CT
Oakville, CT
Bridgewater, CT
Mentions for Walter A Wolk
Publications & IP owners
Us Patents
Copper-Based Metal Polishing Compositions And Polishing Processes
US Patent:
2007021, Sep 20, 2007
Filed:
Jul 19, 2006
Appl. No.:
11/488682
Inventors:
Jonathan J. Wolk - Bethel CT, US
Walter A. Wolk - Bethel CT, US
Walter A. Wolk - Bethel CT, US
Assignee:
Nissan Chemical Industries, Ltd. - Tokyo
International Classification:
C09K 13/00
H01L 21/461
B44C 1/22
H01L 21/302
C03C 15/00
H01L 21/461
B44C 1/22
H01L 21/302
C03C 15/00
US Classification:
438692, 252 791, 216 88, 216 89
Abstract:
A copper-based metal polishing composition includes abrasive particles, a borate, an oxidizing agent, and water. A process for polishing a semiconductor substrate includes positioning the semiconductor substrate; polishing the positioned semiconductor substrate with a first polishing composition including abrasive particles, an ammonium borate, an oxidizing agent, and water, and having a pH of from 6.5 to 9; and further polishing the polished semiconductor substrate with a second polishing composition including abrasive particles, a potassium borate, an oxidizing agent, and water, and having a pH of from 7 to 10.
NOTICE: You may not use BackgroundCheck or the information it provides to make decisions about employment, credit, housing or any other purpose that would require Fair Credit Reporting Act (FCRA) compliance. BackgroundCheck is not a Consumer Reporting Agency (CRA) as defined by the FCRA and does not provide consumer reports.