Inventors:
Li He - Fremont CA, US
Jun Liu - San Ramon CA, US
Danning Yang - Fremont CA, US
Yining Hu - Fremont CA, US
Assignee:
Western Digital (Fremont), LLC - Fremont CA
International Classification:
G11B 5/127
H04R 31/00
US Classification:
2960316, 2960313, 2960314, 2960315, 2960318, 216 62, 216 66, 216 67, 360122, 360317, 451 5, 451 41
Abstract:
A method and system for manufacturing a perpendicular magnetic recording transducer by a process that includes plating is described. The method and system include forming a chemical mechanical planarization (CMP) uniformity structure around a perpendicular magnetic recording pole. The CMP uniformity structure has a height substantially equal to a desired pole height. The method and system also include fabricating an insulator on the CMP uniformity structure and performing a CMP to remove a portion of the insulator. The CMP exposes a portion of the perpendicular magnetic recording pole and planarizes an exposed surface of the perpendicular magnetic recording transducer.