Inventors:
Yu Jin - Chicago IL
Shrinivas G. Joshi - Brookfield WI
International Classification:
H01L 4108
Abstract:
A new type of acoustic wave which is nearly polarized in the shear horizontal direction, and which can propagate in thin elastic plates if the ratio h/. lambda. is less than about 3 where h is the plate thickness and. lambda. is the acoustic wavelength. Attractive properties of this quasi-SH wave include: (i) nearly nondispersive propagation, (ii) very large value of K. sup. 2, the electromechanical coupling coefficient, and (iii) ability to propagate in contact with a liquid medium without suffering excessive attenuation. The nondispersive propagation and large value of K. sup. 2 makes the wave attractive for use in signal processing and sensing devices. Further, the fact that the wave can propagate in contact with a liquid medium allows the wave to be used in sensors that have to operate in contact with a liquid medium.