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Edward A Gritters, 619515 Doe Creek Ct, Peyton, CO 80831

Known as:
Edward Allen Gritters Edward D Gritters Edward K Gritters Karie D Gritters Ed K Gritters
Related to:
Erika F Gritters

Edward Gritters Phones & Addresses

Peyton, CO   

338 River Rd, Felton, CA 95018   

379 River Rd, Felton, CA 95018   

9275 Chetwood Dr, Colorado Springs, CO 80920    719-2820249   

3830 Plains Ter, Colorado Springs, CO 80920    719-5983474   

893 Tari Dr, Colorado Springs, CO 80921   

Education

Degree: Graduate or professional degree
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Mentions for Edward A Gritters

Publications & IP owners

Us Patents

Isolated Electrostatic Chuck And Excitation Method

US Patent:
5315473, May 24, 1994
Filed:
Jan 21, 1992
Appl. No.:
7/823280
Inventors:
Kenneth S. Collins - San Jose CA
Edward A. Gritters - Felton CA
Assignee:
Applied Materials, Inc. - Santa Clara CA
International Classification:
H02N 1300
US Classification:
361234
Abstract:
An electrostatic clamp or chuck and method uses soft square wave, slew rate limited, A. C. clamping voltages and a balanced, differential drive for clamping flat articles such as semiconductor wafers to pedestals, wafer transfer blades, and the like, with a large ratio of clamping force to clamping voltage, reduced decay of the clamping force and associated nearly constant maximum clamping force, instantaneous elimination of remnant clamping force when the clamping voltage is removed (instant off operation), isolation of the clamped article from the clamping voltage, and substantial elimination of vibration. Preferably the A. C. frequency is 0. 1 to 60 Hz. The instant off operation is enhanced by increasing the frequency as the clamping voltage is decreased.

Possible Relatives

Egbert A Gritters  Lisa P Gritters  Roger W Gritters  Edward M Johnson  Edward M Stan  Edward W Stanchak  Edward L Standiford  Edward H Standish  Edward H Johnston  Edward J Stanek 

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