Inventors:
John C. Stover - Bozeman MT
James A. Bender - Bozeman MT
Marvin L. Bernt - Bozeman MT
Donald R. Bjork - Bozeman MT
Paul D. Chausse - Bozeman MT
Daniel R. Cheever - Bozeman MT
Kelly H. Kirchner - Bozeman MT
Tod F. Schiff - Bozeman MT
Vincent C. Skurdal - Bozeman MT
Assignee:
TMA Technologies, Inc. - Bozeman MT
International Classification:
G01N 2147
Abstract:
An optical measurement device produces quality light scatter measurements using Bidirectional Reflective Distribution Function (BRDF) techniques to analyze data generated from an accurate, portable, relatively inexpensive scatterometer. The scatterometer is provided with interchangeable scanning heads, each scanning head being equipped with ROM data storage containing certain configuration information about the scanning head. The use of the interchangeable scanning heads allows the present invention to make measurements of light scatter for a wide variety of applications and samples under a variety of environmental conditions where scatter measurement has previously not been feasible.