Inventors:
- Tokyo, JP
Edward Brian Fletcher - Austin TX, US
Craig William Cone - Austin TX, US
Douglas J. Resnick - Leander TX, US
Zhengmao Ye - Austin TX, US
International Classification:
G03F 7/20
G03F 7/00
Abstract:
An imprinting system and method. An illumination system for imprinting, during a first period of time, that illuminates a first portion of boundary region that surrounds a pattern region with a thickening dosage of light that is within a first dose range, such that the fluid in the first portion of the boundary region does not solidify but does increase a viscosity of the fluid. The illumination system, during a second period of time, illuminates the pattern region with a curing dosage of light that is within a second dose range higher than the first dose range. Prior to illumination, the imprinting includes dispensing droplets and holding a template with a template chuck such that the template contact the droplets and the droplets merge and form a fluid front that spreads through the pattern region and towards the boundary region.