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James Ekberg210 Tonto St, Phoenix, AZ 85003

James Ekberg Phones & Addresses

210 Tonto St, Phoenix, AZ 85003   

Great Bend, KS   

2110 W Tonto Ln, Phoenix, AZ 85027   

Work

Position: Professional/Technical

Education

Degree: Graduate or professional degree

Emails

Mentions for James Ekberg

Career records & work history

License Records

James D Ekberg

Licenses:
License #: 20365
Type: Engineer in Training

James Ekberg

Address:
2110 W Tonto Ln, Phoenix, AZ
Licenses:
License #: 33856 - Active
Category: Professional
Issued Date: Jun 15, 1999
Expiration Date: Jun 30, 2017

Publications & IP owners

Us Patents

Cmp Apparatus And Load Cup Mechanism

US Patent:
2005022, Oct 13, 2005
Filed:
Apr 9, 2004
Appl. No.:
10/821758
Inventors:
David Marquardt - Phoenix AZ, US
Joe Koeth - Chandler AZ, US
James Crawford - Chandler AZ, US
James Ekberg - Tempe AZ, US
Antoni Jakubiec - San Jose CA, US
Michael Smigel - Phoenix AZ, US
John Stumpf - Phoenix AZ, US
International Classification:
B24B005/00
US Classification:
451285000
Abstract:
In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

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