Inventors:
- ARMONK NY, US
Lawrence A. CLEVENGER - LaGrangeville NY, US
John M. COHN - Richmond VT, US
Jeffrey P. GAMBINO - Westford VT, US
William J. MURPHY - North Ferrisburgh VT, US
Anthony J. TELENSKY - Jericho VT, US
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION - ARMONK NY
International Classification:
H01L 21/66
G05B 19/418
H01L 21/67
Abstract:
Systems and methods are provided for implementing a crystal oscillator to monitor and control semiconductor fabrication processes. More specifically, a method is provided for that includes performing at least one semiconductor fabrication process on a material of an integrated circuit (IC) disposed within a processing chamber. The method further includes monitoring by at least one electronic oscillator disposed within the processing chamber for the presence or absence of a predetermined substance generated by the at least one semiconductor fabrication process. The method further includes controlling the at least one semiconductor fabrication process based on the presence or absence of the predetermined substance detected by the at least one electronic oscillator.
