Inventors:
Sungho Jin - Millington NJ
Victor Katsap - Belle Mead NJ
Warren K. Waskiewicz - Clinton NJ
Wei Zhu - Warren NJ
Assignee:
Agere Systems Inc. - Allentown PA
International Classification:
H01J 120
US Classification:
313310, 313346 DC, 313349, 313337
Abstract:
A cathode with an improved work function, for use in a lithographic system, such as the SCALPELâ system, which includes a buffer between a substrate and an emissive layer, where the buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth. The buffer layer may be a solid solution or a multiphase alloy. A method of making the cathode by depositing a buffer between a surface of the substrate and an emissive layer, where the deposited buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth.