Stephen Y Chou, 687 Foulet Dr, Princeton, NJ 08540

6482742, Nov 19, 2002

Jul 18, 2000

09/618174

Stephen Y. Chou - Princeton NJ, 08540

H01L 21302

438690, 438945, 425385, 264293

An improved method of imprint lithography involves using direct fluid pressure to press the mold into a substrate-supported film. Advantageously the mold and/or substrate are sufficiently flexible to provide wide area contact under the fluid pressure. Fluid pressing can be accomplished by sealing the mold against the film and disposing the resulting assembly in a pressurized chamber. It can also be accomplished by subjecting the mold to jets of pressurized fluid. The result of this fluid pressing is enhanced resolution and high uniformity over an enlarged area.

6518189, Feb 11, 2003

Oct 29, 1999

09/430602

Stephen Y. Chou - Princeton NJ

Regents of the University of Minnesota - Minneapolis MN

H01L 21302

438706, 438708, 438711, 438714, 438720, 438725

A method and apparatus for high density nanostructures is provided. The method and apparatus include Nano-compact optical disks, such as nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in topographical bit density nano-CD with nearly three orders of magnitude higher than commercial CDS has been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDS have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silicon probe tip. In accelerated wear tests with a contact mode, the damage threshold was found to be 19 N. This indicates that in a tapping mode, both the Nano-CD and silicon probe tip should have a lifetime that is at least four orders of magnitude longer than that at the damage threshold.

6713238, Mar 30, 2004

Jun 11, 2001

09/807266

Stephen Y. Chou - Princeton NJ, 08540
Lei Zhuang - Princeton NJ, 08540

G03F 700

430322, 430311, 430313, 430330, 427271, 427472, 428338, 264299

The formation of self-assembled patterns in a substrate through deformation induce by a mask placed above the substrate are disclosed. Methods of the present invention may be used to form arrays of nanometer sized pillars as well as mesas from a thin deformable layer of the substrate or a thin film of material deposited on the substrate.

6809356, Oct 26, 2004

Nov 21, 2002

10/301476

Stephen Y. Chou - Princeton NJ

Regents of the University of Minnesota - Minneapolis MN

H01L 27148

257225, 257228, 257257, 369 1301

A method and apparatus for high density nanostructures is provided. The method and apparatus include Nano-compact optical disks, such as nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in topographical bit density nano-CD with nearly three orders of magnitude higher than commercial CDS has been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDS have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silicon probe tip. In accelerated wear tests with a contact mode, the damage threshold was found to be 19 N. This indicates that in a tapping mode, both the Nano-CD and silicon probe tip should have a lifetime that is at least four orders of magnitude longer than that at the damage threshold.

6828244, Dec 7, 2004

Nov 21, 2002

10/301475

Stephen Y. Chou - Princeton NJ

Regents of the University of Minnesota - Minneapolis MN

H01L 21302

438706, 438708, 438711, 438720, 438725

A method and apparatus for high density nanostructures is provided. The method and apparatus include Nano-compact optical disks, such as nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in topographical bit density nano-CD with nearly three orders of magnitude higher than commercial CDS has been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDS have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silicon probe tip. In accelerated wear tests with a contact mode, the damage threshold was found to be 19 N. This indicates that in a tapping mode, both the Nano-CD and silicon probe tip should have a lifetime that is at least four orders of magnitude longer than that at the damage threshold.

6876784, Apr 5, 2005

May 30, 2002

10/158025

Anguel Nikolov - Bridgewater NJ, US
Stephen Y. Chou - Princeton NJ, US

NanoOpto Corporation - Somerset NJ

G02B006/27

385 11, 359483

An optical device for combining two orthogonally polarized beams or splitting a beam into two orthogonally polarized beams is provided that utilizes two collimating/focusing lenses and a thin film wire-grid polarizer. Because the thin film wire-grid polarizer can be fabricated in very thin profile, the provision of a thin film wire-grid polarizer allows the optical polarization beam combiner/splitter device to be highly integrated and simultaneously realize a number of performance advantages of a thin film wire-grid polarizer over other types of polarizers utilized in various prior art polarization beam combiner/splitters.

6946360, Sep 20, 2005

Jun 4, 2002

10/161776

Stephen Y. Chou - Princeton NJ, US

Nanonex Corporation - Princeton NJ

H01L021/30
H01L021/46
C03C027/00
B65C003/26

438455, 438456, 156105, 156156, 156285

An improved method of bonding involves using direct fluid pressure to press together the layers to be bonded. Advantageously one or more of the layers are sufficiently flexible to provide wide area contact under the fluid pressure. Fluid pressing can be accomplished by sealing an assembly of layers to be bonded and disposing the assembly in a pressurized chamber. It can also be accomplished by subjecting the assembly to jets of pressurized fluid. The result of this fluid pressing is reduction of voids and enhanced uniformity over an enlarged area.

6999156, Feb 14, 2006

Sep 30, 2003

10/674608

Stephen Y. Chou - Princeton NJ, US
Allan S. P. Chang - Princeton NJ, US
Hua Tan - Plainsboro NJ, US
Jim Jiam Wong - Orefield PA, US
Wei Wu - Mountain View CA, US
Rich Zhaoning Yu - Levittown PA, US

G02F 1/13

349196, 385 37

In accordance with the invention, a tunable subwavelength resonant grating filter comprises a liquid crystal cell having a pair of major surface walls. One wall of the cell is a coated subwavelength grating of a SRGF. The coating comprises a polymer layer to fill the grating trenches and a surfactant layer to facilitate uniform alignment of the liquid crystal material. The refractive index of the LCD material in the cell can then be electrically or thermally adjusted to tune the resonant wavelength.