Inventors:
Yicheng Lu - East Brunswick NJ, US
Ying Chen - Piscataway NJ, US
Zheng Zhang - Belle Mead NJ, US
Assignee:
Rutgers, the State University of New Jersey - New Brunswick NJ
International Classification:
H01L 29/82
H03H 9/56
US Classification:
257252, 257 79, 257253, 257414, 257E23165, 257E29081, 257E29093, 257E33005, 257E5104, 310313 A, 310313 B, 310313 R, 333133, 333187
Abstract:
The present invention provides the multifunctional biological and biochemical sensor technology based on the integration of ZnO nanotips with bulk acoustic wave (BAW) devices, particularly, quartz crystal microbalance (QCM) and thin film bulk acoustic wave resonator (TFBAR). ZnO nanotips provide giant effective surface area and strong bonding sites. Furthermore, the controllable wettability of ZnO nanostructured surface dramatically reduces the liquid consumption and enhances the sensitivity of the biosensor device.